Conductivity sensor and manufacturing method therefor

Details Conductivity sensor and manufacturing method therefor Conductivity sensor and manufacturing method therefor

G - Physics

01

N

G01N 27/07 (2006.01)

Patent

CA 2597639

A contacting-type conductivity sensor (40,68) includes a plurality of electrodes (30, 66) disposed on a distal surface (24, 54) of a substrate (20, 50). The substrate (20) includes a plurality of vias (22, 52) through which electrical interconnection to the electrodes (30, 66) is accomplished. The conductivity sensor (40,68) can employ two or four electrodes (30, 66) and may have a temperature sensitive element (80) disposed on the distal surface (24, 54). The electrodes (30, 66) may be patterned or otherwise deposited using semiconductor processing techniques.

L'invention concerne un capteur de conductivité du type à contact (40, 68) qui inclut une pluralité d'électrodes (30, 66) disposées sur la surface distale (24, 54) d'un substrat (20, 50). Le substrat (20) inclut une pluralité de trous traversants (22, 52) au travers desquels est accomplie une interconnexion électrique vers les électrodes (30, 66). Le capteur de conductivité (40, 68) peut employer deux ou quatre électrodes (30, 66) et peut comporter un élément sensible à la température (80) disposé sur la surface distale (24, 54). Les électrodes (30, 66) peuvent être formées en motifs ou sinon déposées en utilisant des techniques de traitement de semiconducteurs.

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