Contact pressure sensor and method for manufacturing the same

Details Contact pressure sensor and method for manufacturing the same Contact pressure sensor and method for manufacturing the same

G - Physics

01

L

G01L 1/18 (2006.01)

Patent

CA 2531659

A contact pressure sensor (10) and method for manufacturing a contact pressure sensor for detecting contact pressure between two surfaces is disclosed. The contact pressure sensor disclosed comprises a substrate (40) for supporting the sensor and a contact pressure sensitive layer (26) sensitive to pressure applied to the contact pressure sensor. The method disclosed also comprises transferring a process post structure (8) that is formed on a first process support substrate (20) from the first process support substrate to a second contact pressure sensor support substrate (40).

La présente invention concerne un capteur de pression de contact (10) et un procédé de fabrication d'un capteur de pression de contact destiné à détecter une pression de contact entre deux surfaces. Le capteur de pression de contact de l'invention comprend un substrat (40) destiné à soutenir le capteur, et une couche sensible à la pression de contact (26) qui est sensible à la pression de contact appliquée au capteur de pression de contact. Selon le procédé de l'invention, on transfère une structure de barreau de traitement (8) qui est formée sur un premier substrat de support de traitement (20) depuis le premier substrat de support de traitement jusqu'à un second substrat de support de capteur de pression de contact (40).

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