Contactless system and method for detecting defective points...

G - Physics – 01 – N

Patent

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G01N 27/24 (2006.01) G03G 15/02 (2006.01)

Patent

CA 2562468

A method for detecting charge defect spots (CDSs) on a chargeable surface is provided, including charging the chargeable surface to receive and hold a first voltage charge, spacing a surface of a scanner probe a distance from the chargeable surface, the scanner probe having a diameter, and biasing the scanner probe to a second voltage charge within a predetermined voltage threshold of the first voltage charge, wherein a parallel plate capacitor is established with the chargeable surface and a dielectric substance between the scanner probe and the chargeable surface. The method further includes reading with the scanner probe potentials associated with charges induced from the applied charges and any CDSs on the chargeable surface, including sensing the potentials and generating a signal corresponding to the sensing, applying a reference charge to the chargeable surface, and determining the potential of a CDS on the chargeable surface based on the scanner probe readings and at least one of the applied charges, which includes correcting for non-uniform charge distribution caused by a point-like nature of the CDS on the chargeable surface.

Une méthode de détection des points défectueux sur une surface chargeable est décrite, qui comprend le chargement de ladite surface pour recevoir une première charge de tension, en plaçant une sonde à balayage à une certaine distance de la surface chargeable, la sonde étant d'un diamètre donné, et en polarisant la sonde à balayage par une seconde charge de tension dans une limite prédéterminée de la première charge de tension, où un condensateur anode-cathode est inséré sur la surface chargeable et une substance diélectrique est introduite entre la sonde et la surface chargeable. La méthode comprend également la lecture des valeurs de potentiel de la sonde à balayage, de concert avec les charges induites par les charges appliquées, et des points défectueux sur la surface chargeable, y compris la détection des potentiels et la génération d'un signal correspondant à la détection, l'application d'une charge de référence sur la surface chargeable et la détermination du potentiel d'un point défectueux sur la surface chargeable, en se fondant sur les valeurs relevées de la sonde à balayage et sur au moins une des charges appliquées, qui comprennent la correction pour la distribution non uniforme des charges occasionnée par la nature pointillée des points défectueux sur la surface chargeable.

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