Continuous thermal vacuum deposition device and method

C - Chemistry – Metallurgy – 23 – C

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Details

C23C 14/56 (2006.01) C23C 14/24 (2006.01)

Patent

CA 2564266

The invention relates to a coating method for thermally vacuum-depositing a continuously conveyed substrate (14) that moves within a deposition channel (13) by vaporizing solid or liquid coating materials (10) and vapor-depositing the vaporized coating material onto the substrate in a deposition device. The aim of the invention is to create a coating method for thermally vacuum- depositing a continuously conveyed substrate, in which accessibility to the vaporization device (3) is improved while the processes taking place in the deposition chamber and the vaporization device can be controlled independently of each other. Said aim is achieved by evaporating the coating material in at least one evaporation device located outside the deposition chamber by means of an evaporator, delivery of steam between the evaporator and the deposition channel being regulated.

L'invention concerne un procédé de revêtement pour effectuer un dépôt thermique sous vide sur un substrat transporté en continu, qui se déplace dans un canal de métallisation sous vide, par vaporisation de matériaux de revêtement solides et/ou liquides et par dépôt de vapeur du matériau de revêtement à l'état de vapeur, sur le substrat dans un dispositif de métallisation sous vide. L'invention vise à mettre au point un procédé de ce type pour effectuer un dépôt thermique continu sous vide, sur le substrat transporté en continu, qui permette une meilleure accessibilité au dispositif de vaporisation et simultanément une commande de processus indépendante de la chambre de métallisation sous vide et du dispositif de vaporisation. A cet effet, il est prévu que le matériau de revêtement soit vaporisé avec un vaporisateur dans au moins un dispositif de vaporisation disposé en dehors de la chambre de métallisation sous vide, l'alimentation en vapeur entre le vaporisateur et le canal de métallisation sous vide étant régulée.

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