Contrast enhancement layer compositions, alkylnitrones, and use

Details Contrast enhancement layer compositions, alkylnitrones, and use Contrast enhancement layer compositions, alkylnitrones, and use

C - Chemistry, Metallurgy

07

C

96/172, 260/592.

C07C 291/04 (2006.01) G03F 7/09 (2006.01) G03G 5/09 (2006.01)

Patent

CA 1327974

CONTRAST ENHANCEMENT LAYER COMPOSITIONS, ALKYLNITRONES, AND USE ABSTRACT OF THE DISCLOSURE Contrast enhancement compositions are provided which can be used to make contrast enhancement layer photoresist composites. The composites can be used to make patterned photoresists under mid-UV light and utilize photobleachable alkylnitrones.

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