Control of electron bombardment of the exhaust oxygen sensor...

Details Control of electron bombardment of the exhaust oxygen sensor... Control of electron bombardment of the exhaust oxygen sensor...

C - Chemistry, Metallurgy

23

C

204/96.03

C23C 14/34 (2006.01) C04B 41/51 (2006.01) C04B 41/88 (2006.01)

Patent

CA 1172202

C-3328 D-4,986 CONTROL OF ELECTRON BOMBARDMENT OF THE EXHAUST OXYGEN SENSOR DURING ELECTRODE SPUTTERING Abstract of Disclosure A method of sputtering a platinum exhaust gas electrode onto a vitrified zirconia thimble for an electrochemical-type exhaust gas oxygen sensor. High yields of sensors having fast response times as formed are consistently produced. The exhaust gas outer electrode is sputtered onto the thimble after first forming an inner electrode, using a rate that significantly heats the thimble. The first electrode is maintained electrically isolated from the exhaust electrode during sputtering, and is maintained at a different electrical potential.

395533

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