Control of shrinkage and growth of silicon oxynitride bodies

Details Control of shrinkage and growth of silicon oxynitride bodies Control of shrinkage and growth of silicon oxynitride bodies

C - Chemistry, Metallurgy

04

B

261/41

C04B 35/591 (2006.01) C04B 35/58 (2006.01)

Patent

CA 959077

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