Control techniques for annealing semiconductors

Details Control techniques for annealing semiconductors Control techniques for annealing semiconductors

H - Electricity

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356/178

H01L 21/326 (2006.01) H01L 21/20 (2006.01) H01L 21/268 (2006.01)

Patent

CA 1118114

AUST-425l5 14. CONTROL TECHNIQUES FOR ANNEALING SEMICONDUCTORS Abstract For improving the control over a process for annealing surface layers (14) of semiconductor bodies (10) by melting the surface layer by a beam of radiant energy (21), the reflectivity of the surface of the layer is monitored (20,22) to detect when the surface layer changes its state between molten and solid states, and the amount of radiant energy directed to the surface is controlled (24) in response to such change.

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