Controlled thallous oxide evaporation for thallium...

H - Electricity – 01 – L

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H01L 39/24 (2006.01) B05C 9/14 (2006.01) B05D 3/02 (2006.01) C23C 14/58 (2006.01) C30B 23/02 (2006.01) H01L 39/12 (2006.01) C23C 14/08 (2006.01) C23C 14/54 (2006.01)

Patent

CA 2041319

Methods and reactors are described for the production of thallium cuprate based high temperature superconductor films on a variety of substrates. The reactors provide for low volume cavities, means for rapidly heating and cooling to and from a predetermined elevated temperature and control of the thallium oxide overpressure during the processing. Uniform high temperature superconducting films are obtained while inhibiting reaction between the substrate and superconducting film during the processing.

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