Controls for semiconductor wafer orientor

Details Controls for semiconductor wafer orientor Controls for semiconductor wafer orientor

G - Physics

05

D

341/105

G05D 3/00 (2006.01) B65G 51/03 (2006.01) H01L 21/677 (2006.01)

Patent

CA 1097770

CONTROLS FOR SEMICONDUCTOR WAFER ORIENTOR ABSTRACT This specification deals with electro-optic controls for stopping and orienting of a semiconductor wafer being transported along a track on an air film. At one or more locations along the track the characteristics of the air film are changed by electronic controls responding to optical pickups sensing the position and orientation of a semiconductor wafer entering the particular location on the air film to first stop the wafer in the general proximity of the location, then center the wafer in the location and after the wafer is centered, quickly rotate the wafer until it assumes the desired orienta- tion. All this is done without edge contact of the wafer by any solid objects.

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