Conversion of silica precursors to silica at low temperatures

Details Conversion of silica precursors to silica at low temperatures Conversion of silica precursors to silica at low temperatures

B - Operations, Transporting

05

D

B05D 3/04 (2006.01) B05D 3/02 (2006.01) C04B 41/50 (2006.01) C04B 41/87 (2006.01) C23C 20/08 (2006.01) H01L 21/316 (2006.01)

Patent

CA 2042694

ABSTRACT This invention relates to a low temperature method of converting silica precursor coatings to ceramic silica coatings. The method comprises applying a silica precursor coating to a substrate, exposing the coating to an environment comprising ammonium hydroxide and/or wet ammonia vapors and subjecting the coating to a temperature sufficient to yield the ceramic coating. The methods of the invention are particularly applicable to applying coatings on electronic devices.

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