Conveying apparatus

Details Conveying apparatus Conveying apparatus

B - Operations, Transporting

65

G

B65G 49/07 (2006.01) H01L 21/00 (2006.01) H01L 21/677 (2006.01) H01L 21/68 (2006.01)

Patent

CA 2249771

A conveying apparatus suitable for use with an apparatus for manufacturing a semiconductor device is disclosed which is capable of being less costly. The conveying apparatus includes a clean box, which is conveyed along a conveying path by a conveying device. A clean bench is spaced from the conveying path at a predetermined spacing to define a space between the conveying path and the clean bench and is constructed so as to eject clean air toward the conveying path to keep the space between the conveying path and the clean bench clean. Also, the clean bench has an air guide extending along an edge thereof in the direction of the conveying path and projecting downwardly therefrom.

Appareil transporteur à utiliser avec un appareil de fabrication d'un dispositif à semi-conducteur pouvant coûter moins cher. L'appareil transporteur inclut une boîte propre, transportée le long d'un trajet par un dispositif transporteur. Un banc propre est éloigné du trajet par un écart prédéterminé de façon à définir un écart entre le trajet et le banc. Il est construit de façon à expulser de l'air pur vers le trajet transporteur de façon à maintenir propre l'espace entre le trajet et le banc. De plus, le banc propre comprend un diffuseur d'air se prolongeant le long d'un de ses bords, dans la direction du trajet, et se projetant vers le bas.

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