Coolant for the treatment and production of wafers

Details Coolant for the treatment and production of wafers Coolant for the treatment and production of wafers

C - Chemistry, Metallurgy

09

K

C09K 5/08 (2006.01) B24B 55/02 (2006.01)

Patent

CA 2576788

The invention relates to a coolant for use in the production and/or treatment of ingots and/or wafers, the coolant containing a surfactant in order to improve the quality of the production or treatment.

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