Cooled capacitor container for semiconductor melting device

Details Cooled capacitor container for semiconductor melting device Cooled capacitor container for semiconductor melting device

C - Chemistry, Metallurgy

30

B

327/4

C30B 13/00 (2006.01) C30B 13/20 (2006.01)

Patent

CA 1041177

C A N A D A ABSTRACT A device is described for the non-crucible zone melting of semiconductor material rods, in which the capacitance of the heating circuit for the induction heating coil is formed by parallel-connected ceramic capacitors in an oil filled, vacuum- tight container and in which the current supply lines are simultaneously coolant supply lines.

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