Cooling apparatus for integrated circuit chips

H - Electricity – 01 – L

Patent

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Details

H01L 23/473 (2006.01) H01L 23/433 (2006.01)

Patent

CA 2126291

A cooling apparatus for integrated circuit chips in which the pressure of coolant does not affect is disclosed. The block is provided with a plurality of holes. Cooling members are inserted in these holes. An elastic member is filled between the block and the cooling member. The cooling member is supported to the block by the elastic member. Each cooling members is connected each other by pipes. A bellows is provided between the cooling member and the pipe. When the block is loaded on the substrate on which the integrated circuit chips are mounted, the elastic member deforms and the cooling member displaces in accordance with the height and inclination of the integrated circuit chip. The lower surface of the cooling member is brought into close contact with the integrated circuit chip due to the deformation of the elastic member. The bellows deforms in accordance with the displacement of the cooling member to ensure the normal connection of the pipe. when the coolant is supplied, the expanded bellows pushes the pipe up but does not push the cooling member down.

L'invention a trait à un appareil de refroidissement pour une puce de circuit imprimé dans lequel la pression exercée par le réfrigérant n'affecte pas la puce. La plaquette comprend une pluralité d'orifices. Les éléments de refroidissement sont insérés dans ces orifices. Un élément élastique est introduit entre la plaquette et l'élément de refroidissement. Ce dernier repose sur la plaquette grâce à l'élément élastique. Tous les éléments de refroidissement sont connectés entre eux par des conduits. Un soufflet est disposé entre l'élément de refroidissement et le conduit. Lorsque la plaquette est placée sur le substrat sur lequel les puces de circuit imprimé sont montées, l'élément élastique se déforme et l'élément de refroidissement se déplace selon la hauteur et l'inclinaison de la puce de circuit intégré. La surface inférieure de l'élément de refroidissement est mise en contact étroit avec la puce de circuit intégré en raison de la déformation de l'élément élastique. Le soufflet se déforme en fonction du déplacement de l'élément élastique afin d'assurer le raccordement normal avec le conduit. Lorsque le réfrigérant est fourni, le soufflet distendu pousse le conduit vers le haut, sans toutefois abaisser l'élément de refroidissement.

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