H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/205 (2006.01) H01L 21/00 (2006.01) H01L 21/3065 (2006.01) H01L 21/68 (2006.01)
Patent
CA 2516210
A cooling device for a vacuum treatment device, comprising an internal heat transfer passage for transporting heat flowing into a treated body in the vacuum treatment device, a radiation passage for radiating the transported heat to the outside of the vacuum treatment device, and a heat transfer passage for controlling a heat transmitting quantity between the internal heat transfer passage and the radiation passage. The internal heat transfer passage desirably adopts a heat pipe.
L'invention concerne un dispositif de refroidissement pour dispositif de traitement sous vide, comprenant un passage de transfert de chaleur destiné à transporter la chaleur s'écoulant dans un corps traité du dispositif de traitement sous vide, un passage de rayonnement destiné à rayonner la chaleur transportée vers l'extérieur du dispositif de traitement sous vide, et un passage de transfert de chaleur destiné à réguler une quantité de chaleur transférée entre le passage de transfert de chaleur et le passage de rayonnement. Le passage de transfert de chaleur interne se présente idéalement sous la forme d'un conduit calorique.
Miyoshi Kazuo
Otsuka Hiroyuki
Ueda Masashi
Watabe Yoshimi
Yamasaki Shusaku
Gowling Lafleur Henderson Llp
Ishikawajima-Harima Heavy Industries Co. Ltd.
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