C - Chemistry – Metallurgy – 23 – F
Patent
C - Chemistry, Metallurgy
23
F
149/14, 149/19
C23F 1/02 (2006.01) C23F 1/18 (2006.01) H05K 3/06 (2006.01)
Patent
CA 1039631
Abstract This invention provides copper and copper alloy etching solutions comprising a mixed aqueous solution of a peroxysulfate with a diazine compound and a halogen compound added as the catalyst. There is also provided a process for etching copper and copper alloys with said etching solutions.
209481
Itani Katsutoshi
Matsumoto Akira
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