Copper and copper alloy etching solutions and process

C - Chemistry – Metallurgy – 23 – F

Patent

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149/14, 149/19

C23F 1/02 (2006.01) C23F 1/18 (2006.01) H05K 3/06 (2006.01)

Patent

CA 1039631

Abstract This invention provides copper and copper alloy etching solutions comprising a mixed aqueous solution of a peroxysulfate with a diazine compound and a halogen compound added as the catalyst. There is also provided a process for etching copper and copper alloys with said etching solutions.

209481

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