H - Electricity – 01 – L
Patent
H - Electricity
01
L
356/200
H01L 41/22 (2006.01) H01G 7/02 (2006.01) H01L 41/26 (2006.01)
Patent
CA 1169981
-1- ABSTRACT OF THE INVENTION The present invention provides a process for preparing piezoelectric film using a corona discharge device wherein a multi-layer of pellicles, of which at least one or more is a piezoelectric sensitive film and at least one other of the multi-layer is a companion pellicle (i.e. a pellicle with a conductance no less than that of the piezoelectric sensitive pellicle when the conductance is measured under the poling condition of the corona discharge and in the direction of the discharge field), is subjected to a corona discharge between a pair of electrodes of which at least one such electrode has a textured surface.
387376
Atochem North America Inc.
Borden Ladner Gervais Llp
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