C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
C23C 30/00 (2006.01) C23C 16/36 (2006.01) C23C 28/04 (2006.01)
Patent
CA 2622924
The invention relates to a coating comprising a thin film which is intended to protect a corrodible part against corrosion and, to some extent, against wear and friction, said coating essentially comprising a composition containing silicon, carbon, hydrogen and nitrogen such that: the atomic hydrogen concentration, measured using the ERDA technique, is 20 ± 5 atoms %; the atomic silicon concentration, measured using the Rutherford backscattering (RBS) technique, is between 15 and 28 atoms %; the ratio of the atomic concentrations of nitrogen and carbon (N/C) is greater than 0.9; and the hardness of the material is less than or equal to 2100 daN/mm2.
Un revêtement en couche mince pour protéger vis-à-vis de la corrosion, et dans une certaine mesure contre l'usure et le frottement, une pièce en un matériau corrodable, est essentiellement constitué de silicium, de carbone, d'hydrogène et d'azote dans une composition telle que : la teneur atomique en hydrogène, mesurée par la technique ERDA, est de 20 ~ 5 atomes %, la teneur atomique en silicium mesurée par la technique de rétrodiffusion Rutherford (RBS) est comprise entre15 et 28 atomes %, le rapport des concentrations atomiques de l'azote et du carbone (N/C) est supérieur à 0,9, la dureté du matériau est inférieure ou égale à 2 100 daN/mm2.
Gachon Yves
Heau Christophe
Maurin-Perrier Philippe
H.e.f.
Robic
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