H - Electricity – 01 – J
Patent
H - Electricity
01
J
358/8
H01J 49/04 (2006.01) F04F 9/00 (2006.01) G01M 3/20 (2006.01)
Patent
CA 1310765
Abstract of the Disclosure COUNTERFLOW LEAK DETECTOR WITH HIGH AND LOW SENSITIVITY OPERATING MODES A counterflow helium mass spectrometer leak detector in which a helium sample passes in a reverse direction through a diffusion pump to a mass spectrometer for measurement. The diffusion pump includes a conventional foreline and a second foreline provided with an ejector stage. A test sample is coupled from a test port through a bypass valve to the conventional foreline in a high sensitivity mode and is coupled to the second foreline in a low sensitivity mode. In the low sensitivity mode, the bypass valve is closed. An apertured control plate in the diffusion pump controls the relative reverse rates of diffusion from each foreline to the diffusion pump inlet by controlling the rates of vapor flow to annular pumping stages and to the ejector stage. The ejector stage includes a nozzle for directing a stream of vapor into the second foreline so as to inhibit flow of helium into the diffusion pump and establish a lower reverse diffusion rate at the second foreline. The disclosed configuration permits measurement of a large range of leak rates.
585585
R. William Wray & Associates
Varian Inc.
LandOfFree
Counterflow leak detector with high and low sensitivity... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Counterflow leak detector with high and low sensitivity..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Counterflow leak detector with high and low sensitivity... will most certainly appreciate the feedback.
Profile ID: LFCA-PAI-O-1318350