Covered microchannels and the microfabrication thereof

G - Physics – 03 – F

Patent

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Details

G03F 7/00 (2006.01) G01N 27/447 (2006.01) G01N 30/60 (2006.01)

Patent

CA 2244780

The present invention is a covered microchannel comprising: a) a substrate; b) an etched material adhered to the substrate; and c) a silicon-carbon material adhered to the etched material in such a manner to form a covered microchannel; wherein the silicon-carbon material comprises SiO1.8-2.4 C0.3-1.0 and H0.7- 4.0 containing at least one of the following functional groups: -Si-O-Si-, -Si-CH2-, -Si-H, or -Si-OH. The covered microchannel can be prepared by the steps of: a) coating a filler material onto a substrate having a groove, wherein the filler material covering the substrate fills the groove; b) removing filler material from the substrate but not from the groove; c) coating the substrate and the filler with an adhering, formable, capping material; and d) removing the filler from the groove. An etched laminate can also be used to prepare the covered microchannel. The present invention provides a covered microchannel that can be prepared under milder conditions than those previously contemplated, thereby allowing greater flexibility in the choice of material of the substrate. The covered microchannel can be used, for example, in micro-liquid or micro-gas chromatographic or electrophoretic applications.

Cette invention se rapporte à un microcanal couvert comprenant: (a) un substrat; (b) un matériau attaqué collé audit substrat; et (c) un matériau silicium-carbone collé audit matériau attaqué, de façon à former un microcannal couvert; ce matériau silicium-carbone comprenant SiO1.8-2.4, C0.3-1.0 et H0.7-4.0 contenant au moins l'un des groupes fonctionnels suivants: -Si-O-Si-, -Si-CH2-, -Si-H, ou -Si-OH. On peut préparer ce microcanal couvert au moyen des étapes suivantes: (a) former un revêtement au moyen d'un matériau de charge sur un substrat ayant une rainure, jusqu'à ce que le matériau de charge couvrant le substrat remplisse la rainure; (b) retirer le matériau de charge du substrat mais non de la rainure; (c) recouvrir le substrat et la charge avec un matériau couvrant façonnable et collant; et (d) retirer la charge de la rainure. Un stratifié attaqué peut également être utilisé pour préparer ce microcanal couvert. Cette invention propose un microcanal couvert que l'on peut préparer dans des conditions plus douces que celles préalablement envisagées, permettant ainsi une plus grande flexibilité dans le choix du matériau du substrat. Ce microcanal couvert peut être utilisé notamment dans des applications en chromatographie ou électrophorèse à microliquide ou microgaz.

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