Critical orifice dilution apparatus and method

G - Physics – 05 – D

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G05D 11/02 (2006.01) G01N 33/00 (2006.01) G05D 11/03 (2006.01)

Patent

CA 2062059

ABSTRACT An apparatus and method are provided for preparing low concentration gas phase calibration standards. The flows of a standard mixture of impurity in a gas and a dilution gas are controlled by regulating the pressure upstream of respective calibrated orifices. The pressures of the gas flows are regulated such that a critical flow condition is maintained through the orifices. The two flows are then combined to obtain a known dilution of the impurity in the gas.

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