Cross under metal wiring structure for self-scanning...

B - Operations – Transporting – 41 – J

Patent

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B41J 2/45 (2006.01) H01L 27/15 (2006.01) H01L 33/00 (2006.01)

Patent

CA 2351368

A metal interconnection structure of cross-under interconnection formed on a pnpn structure is provided for prevention of latchup. The structure comprises a lower interconnection provided on the uppermost layer of a pnpn structure isolated insularly by an isolation trench, and an upper interconnection connected with the lower interconnection through a first contact hole made in an insulation film covering the pnpn structure. The upper interconnection is connected with a layer directly under the uppermost layer through a second contact hole made in the insulation film.

Cette invention concerne une structure métallique d'interconnexion croisée formée sur une structure pnpn destinée à empêcher le verrouillage. Cette structure comprend une interconnexion inférieure sur la dernière couche de la structure pnpn qui est complètement isolée sur un îlot par une tranchée, et une interconnexion supérieure reliée à l'interconnexion inférieure par un premier trou de contact pratiqué dans le film isolant qui recouvre la structure pnpn. L'interconnexion supérieure est reliée à une couche située immédiatement sous la couche la plus haute via un second trou de contact réalisé dans le film isolant.

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