Cryogenic probe station

Details Cryogenic probe station Cryogenic probe station

G - Physics

01

R

G01R 31/02 (2006.01) G01R 31/28 (2006.01)

Patent

CA 2072132

ABSTRACT ATE is mounted directly to a support (10,26) surrounding and removably receiving probe cards (32) of differing thickness. An electrically heated chuck (40) having a variable heat transfer coefficient heat exchanging face (46) confronting a liquid nitrogen supplied plenum (66) exhibits a temperature that varies with electrical heater load, rate of liquid nitrogen supply, and heat transfer coefficient of the heat exchanging face. The rate of liquid nitrogen supply is varied as a function of whether or not the electrical heater load falls outside predetermined upper and lower bounds to establish and maintain set point temperature over a range of set-point temperatures including liquid nitrogen temperature and ambient temperature. The chuck is mounted for X, Y move- ment on load-balanced air/vacuum bearing (170,174,178,180), and is mounted for Z movement to accommodate different thick- ness probe cards. A load-lock (200) having a pivoting cassette receiving tray (206) that pivots with a pivoting transfer arm (215) is mounted for Z movement with the chuck. A vacuum pump (128) selectively lowers the temperature at which the supplied liquid nitrogen boils. A positive pressure of N2 gas is maintained to prevent moisture condensation in the load-lock and on the operative surfaces of the chuck.

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