Cryogenic pump having maximum aperture throttled port

Details Cryogenic pump having maximum aperture throttled port Cryogenic pump having maximum aperture throttled port

F - Mech Eng,Light,Heat,Weapons

04

B

62/69

F04B 37/08 (2006.01) F04D 29/56 (2006.01) F16K 13/00 (2006.01)

Patent

CA 1195519

ABSTRACT A low-temperature pump having a throttling valve formed by tilting radially disposed vanes in side-by-side relation, capable of fully opening a pump port to a process chamber. Motion from one vane can be coupled to the next through shims which support the vanes and form a seal when the vanes are flat in a common plane. One of the vanes may be controlled independently of the others so that coarse and fine modes of operation may be achieved by separately controlling (N-1) vanes and the Nth vane. The vanes are maintained in thermal contact with a chilled outer wall surface of a first pumping stage of a two- stage pump, the second stage coaxially surrounding a first stage maintained at a very low temperature. A central hub, at the convergence region for the vanes, supports a shield, protecting the second stage from radiation through a port in the upper regions of the pump.

435469

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