Cryogenic rectification system for fluorine compound recovery

Details Cryogenic rectification system for fluorine compound recovery Cryogenic rectification system for fluorine compound recovery

C - Chemistry, Metallurgy

01

B

C01B 7/20 (2006.01) C01B 17/45 (2006.01) C01B 21/083 (2006.01) C07C 17/38 (2006.01) C07C 19/08 (2006.01) F25J 3/02 (2006.01)

Patent

CA 2165366

A cryogenic system for the recovery of fluorine compounds from a carrier gas stream such as an effluent stream from a semiconductor facility comprising a mass transfer contacting device, such as a cryogenic wash column, integrated with a cryogenic rectification column system.

Un système cryogénique pour la récupération de composés fluorés à partir d'un flux gazeux vecteur, comme un flux d'effluent provenant d'une usine de semi-conducteurs, comprend un dispositif de contact avec transfert de masse, comme une colonne de lavage cryogénique, intégrée à un système de colonne de rectification cryogénique.

Affiliated with

Also associated with

Rating

Cryogenic rectification system for fluorine compound recovery does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Cryogenic rectification system for fluorine compound recovery, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Cryogenic rectification system for fluorine compound recovery will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1390660