Cryogenic rectification system for recovery of fluorine...

Details Cryogenic rectification system for recovery of fluorine... Cryogenic rectification system for recovery of fluorine...

F - Mech Eng,Light,Heat,Weapons

25

J

162/101

F25J 3/02 (2006.01) C07C 17/38 (2006.01)

Patent

CA 2243832

A cryogenic system for the recovery of fluorine compounds from a carrier gas stream such as an effluent stream from a semiconductor facility comprising three cryogenic rectification columns and a mass transfer contacting device.

Système cryogénique pour la récupération de composés fluorés à partir d'un flux gazeux vecteur, comme un effluent provenant d'une installation fabriquant des semiconducteurs, comprenant trois colonnes de rectification cryogénique et un dispositif de mise en contact à transfert massique.

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