Cryopump

Details Cryopump Cryopump

F - Mech Eng,Light,Heat,Weapons

04

B

62/69

F04B 37/08 (2006.01)

Patent

CA 1192756

CRYOPUMP Abstract Of The Disclosure The inner cryopanel of a cryopump includes a sub- strate having a pluality of holes such that the open areas represent 30% to 70% of the surface area of the substrate, A layer of cryosorbing material is secured to one surface of the substrate. In imperfored panel is juxtaposed to said one surface of said substrate.

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