Cryopump

Details Cryopump Cryopump

F - Mech Eng,Light,Heat,Weapons

25

B

F25B 30/00 (2006.01) F04B 37/08 (2006.01)

Patent

CA 2064324

ABSTRACT To perform an even, high temperature baking treatment at about 450 ° C to a cryopump for the achievement of an extreme high vacuum, the cryopump is divided into two, a pump section P and a refrigerator R; the pump section P is cut off, with a vacuum state maintained, from the refrigerator R; and cooling stages 49 and 69 of the refrigerator R are connected through detachable heat transfer means 53 and 73 to cryopanel 2 and 5 of the pump section P, whereby the pump section P and the refrigerator R being detachably connected together. A drive unit of the refrigerator R and a casing 1 of the pump section P are connected together by a bellows 36, and at least a part of the transfer means 53, which connects the cooling stage 49 and 69 of the refrigerator R to the cryopanels 2 and 5 of the pump section P, made of a flexible material. 38

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