Cryopump apparatus

Details Cryopump apparatus Cryopump apparatus

F - Mech Eng,Light,Heat,Weapons

04

B

62/69

F04B 37/08 (2006.01) B01D 8/00 (2006.01)

Patent

CA 1141556

- I - ABSTRACT Cryopump apparatus includes means for supplying cryogenic fluid, means for supplying higher tempera- ture refrigerant fluid, a panel having heat exchange surfaces on respective opposite sides thereof, with a conduit conducting cryogenic fluid therethrough, and a zigzag passageway formed by opposite sides of two radiation shields in spaced relationship with each other having the panel therebetween. The radiation shields are spaced from the panel, optically enclosing the panel therewithin. Corresponding edges of adjacent shields define open bottom channel-con- figured passageways for flow of gas therethrough to respective heat exchange surfaces of a panel inter jacent the shields. The shields include conduits for flow of refrigerant fluid therethrough. Heat insula- tive positioning spacer means contact two adjacent panels and a shield therebetween, maintaining the panels and shield in spaced relationship.

372477

Affiliated with

Also associated with

Rating

Cryopump apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Cryopump apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Cryopump apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-733495