F - Mech Eng,Light,Heat,Weapons – 04 – B
Patent
F - Mech Eng,Light,Heat,Weapons
04
B
62/69
F04B 37/08 (2006.01)
Patent
CA 1231241
ABSTRACT Cryopump apparatus including a plurality of parallel heat conductive panels, each panel including heat exchange surfaces on respective opposite sides thereof, and first conduit means for flow of a cryogenic fluid therethrough; wherein said first conduit means is adapted to be connected to a cryogenic fluid supply means for flow of cryogenic fluid through said conduit means, and a plurality of heat conductive radiation shields in spaced alternating interjacent relationship with said panels, each shield including second conduit means for flow of a refrigerant fluid therethrough; wherein adjacent shields overlap one another to optically enclose said panels within said shields, with corresponding respective edge portions of said shields defining respective channel passageways for flow of gas therethrough to respective heat exchange surfaces of said panels interjacent said shields; wherein said second conduit means is adapted to be connected to a refrigerant fluid supply means for flow of refrigerant fluid through said shields. The cryopump apparatus is used to evacuate large closed chambers to ultra-high vacuums.
530296
Borden Ladner Gervais Llp
Cvi Incorporated
LandOfFree
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