Cryopump with exhaust filter

Details Cryopump with exhaust filter Cryopump with exhaust filter

F - Mech Eng,Light,Heat,Weapons

04

B

62/69

F04B 37/08 (2006.01)

Patent

CA 1252300

CRYOPUMP WITH EXHAUST FILTER Abstract of the Disclosure An exhaust port from a cryopump vacuum vessel leads to an exhaust valve. The valve is protected from contamination by a filter standpipe which extends from the exhaust port into the vacuum vessel and which is open at its end opposite to the exhaust port. The standpipe is of porous material which allows the free flow of gas, water, and liquid cryogens therethrough while retaining contaminating debris within the vacuum vessel. The filter conduit is of screen formed into a cylinder. One end is tapered and pressed into the exhaust conduit. The screen cylinder is stopped in the exhaust conduit by a circumferential ridge.

514193

Affiliated with

Also associated with

Rating

Cryopump with exhaust filter does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Cryopump with exhaust filter, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Cryopump with exhaust filter will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1265614