Cryopump with improved adsorption capacity

Details Cryopump with improved adsorption capacity Cryopump with improved adsorption capacity

F - Mech Eng,Light,Heat,Weapons

04

B

62/69

F04B 37/08 (2006.01)

Patent

CA 1221553

CRYOPUMP WITH IMPROVED ADSORPTION CAPACITY Abstract A cryopump 20 with increased adsorptive capaci- ty comprising a honeycomb adsorption structure 46 positioned within a second stage chevron assembly 40. Multiple chambers 58 of the honeycomb are covered with adsorbent charcoal 68. The entire structure 46 is attached to a second stage 52 of a cryogenic refrigerator 45.

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