Cryopump with rapid cooldown and increased pressure stability

Details Cryopump with rapid cooldown and increased pressure stability Cryopump with rapid cooldown and increased pressure stability

F - Mech Eng,Light,Heat,Weapons

04

B

62/69

F04B 37/08 (2006.01)

Patent

CA 1220948

ABSTRACT In a cryopump, condensation of gases such as argon, oxygen and nitrogen on surfaces other than the second stage array 38, 40 is avoided to prevent cross over hang up and pressure instabil- ity. To prevent condensation of argon, oxygen and nitrogen on the frontal cryopumping array 46, that array is held to a temperature of at least 50 K. A heat load to the first stage increases as the temperature of the first stage drops. That heat load is provided by a high emissivity radiation shield 44 or by a thermal switch 56, 58. Condensa- tion of argon and other gases on the second stage refrigerator cylinder 32 is avoided by a close fitting sleeve 52 positioned over the refrigerator cylinder 32 in thermal contact with the second stage heat sink 30 but out of thermal contact with the cylinder 32.

451154

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