Cryopumping installations with high flow-rates

Details Cryopumping installations with high flow-rates Cryopumping installations with high flow-rates

Category

B - Operations, Transporting

Subcategory

01

Subsubcategory

D

CPC

62/69

IPC codes

B01D 5/00 (2006.01) F04B 37/08 (2006.01)

Type

Patent

Patent number

CA 896240

Affiliated with

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