Cryopumping method and apparatus

Details Cryopumping method and apparatus Cryopumping method and apparatus

F - Mech Eng,Light,Heat,Weapons

25

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62/69

F25D 15/00 (2006.01) F04B 37/02 (2006.01) F04B 37/08 (2006.01)

Patent

CA 1070130

ABSTRACT OF THE DISCLOSURE Cryopumping speed of nitrogen, helium, hydrogen and neon can be increased by omitting the chevron baffle in a conven- tional cryopump and preventing incident radiation of about 300°K from striking surfaces used to cryosorb helium, hydrogen and neon. An apparatus is disclosed utilizing three pumping surfaces created from open ended opposed nested cylinders. A radiation absorbent coating is placed on one of the surfaces to shield the helium, hydrogen and neon pumping surface. Refrigeration can be provided by a two-stage closed cycle cryogenic refrigerator.

303401

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