Current change limiting device

Details Current change limiting device Current change limiting device

H - Electricity

02

H

H02H 9/02 (2006.01) H01J 37/00 (2006.01)

Patent

CA 2646522

In a method of limiting the current (I out) flowing between a plasma chamber (3) and a power supply (2), wherein the current change di/dt is limited if the current exceeds a predetermined current by a by a current change limiting device (7, 40) which is provided in the current path between the power supply (2) and the plasma chamber (3).

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