Cvd diamond radiation detector

Details Cvd diamond radiation detector Cvd diamond radiation detector

G - Physics

01

T

G01T 1/16 (2006.01) C23C 16/27 (2006.01) C30B 29/04 (2006.01) G01T 1/26 (2006.01) G01T 1/28 (2006.01) H01L 21/205 (2006.01)

Patent

CA 2127832

The process is an arc jet CVD diamond deposition process with very low methane, less than 0.07%, and the addition of water. The resulting material is characterized by a narrow Raman peak, a relatively large lattice constant, and a charge carrier collection distance of at least 25 microns. Also disclosed. is a particle detector device which makes use of the diamond material according to the invention.

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