Cylindrical target and its production method

Details Cylindrical target and its production method Cylindrical target and its production method

C - Chemistry, Metallurgy

23

C

C23C 14/34 (2006.01) C23C 14/10 (2006.01)

Patent

CA 2418807

A method of manufacturing a cylindrical target, comprising the steps of disposing a damping member (52) such as carbon felt between a metallic packing tube as an inner tube and a cylindrical target material as an outer tube, and connecting both thereof to each other, whereby the possibility of selection of the target material and the packing tube material supporting the target material is increased, and the cylindrical target can be manufactured easily and re-used.

L'invention concerne un procédé de fabrication d'une cible cylindrique, consistant à disposer un élément d'amortissement (52) tel que du feutre de carbone entre un tube de garniture métallique comme tube intérieur et un matériau de cible cylindrique comme tube extérieur puis à assembler ces deux tubes. Selon cette invention, la possibilité de sélection du matériau de la cible et du matériau du tube de garniture adapté au matériau de la cible est plus grande et la cible cylindrique peut être facilement fabriquée et réutilisée.

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