D.c. reactively sputtered antireflection coatings

Details D.c. reactively sputtered antireflection coatings D.c. reactively sputtered antireflection coatings

G - Physics

02

B

G02B 1/10 (2006.01) C03C 17/34 (2006.01) G02B 1/11 (2006.01)

Patent

CA 2070637

A multilayer antireflection coating (20) designed for deposition in in-line coating machines by DC reactive sputtering. About half of the total thickness of the coating (20) may be formed from zinc oxide which has a high sputtering rate.

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