Damping support structure

Details Damping support structure Damping support structure

F - Mech Eng,Light,Heat,Weapons

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F16F 15/04 (2006.01) B23Q 11/00 (2006.01) B25H 1/00 (2006.01) F16F 15/027 (2006.01) F16M 7/00 (2006.01) G12B 5/00 (2006.01) H01L 21/68 (2006.01) H05K 13/00 (2006.01)

Patent

CA 1323410

ABSTRACT OF THE DISCLOSURE A damping support structure for preventing vibra- tions of an apparatus table supporting an apparatus for manufacturing ultra-high precision devices such as semiconductors and printed circuit boards. The appa- ratus table is supported by a support deck suspended to be horizontally displaceable. Linear motors are actuated in response to vibrations of the apparatus table detected by vibration sensors. The apparatus table is thus displaceable relative to a stationary section, to be safeguarded against the vibrations.

601760

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