Decreasing the porosity and surface roughness of ceramic...

Details Decreasing the porosity and surface roughness of ceramic... Decreasing the porosity and surface roughness of ceramic...

C - Chemistry, Metallurgy

04

B

117/110, 6/222

C04B 41/87 (2006.01) C04B 41/50 (2006.01) H01L 21/461 (2006.01) H01L 21/48 (2006.01) H01L 27/00 (2006.01)

Patent

CA 1108355

ABSTRACT The porosity and surface roughness of ceramic sub- strates are improved by coating the surface with silicon compounds, drying the coated substrate, and then subjecting the substrate to elevated temperature so as to convert the silicon compounds to silicon oxides. Coated substrates obtained by the above process as well as specific preferred organisilane compositions are provided. EN978011

337940

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