Deep buried layers for semiconductor devices

Details Deep buried layers for semiconductor devices Deep buried layers for semiconductor devices

H - Electricity

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356/153

H01L 29/06 (2006.01) C30B 13/02 (2006.01) C30B 13/06 (2006.01) H01L 21/00 (2006.01) H01L 21/24 (2006.01) H01L 21/285 (2006.01) H01L 21/306 (2006.01) H01L 21/40 (2006.01) H01L 21/74 (2006.01)

Patent

CA 1021067

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