Defect detecting method and apparatus

Details Defect detecting method and apparatus Defect detecting method and apparatus

H - Electricity

04

N

350/32, 341/58,

H04N 7/00 (2006.01) G01N 21/90 (2006.01)

Patent

CA 1189951

ABSTRACT OF THE DISCLOSURE In a defect detecting method and apparatus, the image of an object under inspection is formed, the signals of picture elements forming the image is stored, the picture elements signals are accumulated for each of the regions which form parts of the image, the results of the accumu- lations for regions proximate to each other are compared, and a defect is detected from the result of the comparison.

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