Defect detecting method and device

Details Defect detecting method and device Defect detecting method and device

G - Physics

01

N

350/32, 340/124.

G01N 21/90 (2006.01)

Patent

CA 1175139

ABSTRACT OF THE DISCLOSURE In a defect detecting method and device, an image formed by receiving light from an illuminated object to be examined, is divided into a plurality of picture elements, and the signals of the picture elements are stored. The signals are later read out in the order in which the portions of the object corresponding respectively to the picture elements are traversed by a sub- stantially spiral imaginary line drawn on said object, and a defect is detected from the relationship between the signal of one of the picture elements and the signal of another picture element read out a little before the reading of the signal of said one of the picture elements.

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