Defect integrated processing apparatus and method thereof

Details Defect integrated processing apparatus and method thereof Defect integrated processing apparatus and method thereof

G - Physics

01

N

G01N 21/88 (2006.01) G01N 21/896 (2006.01)

Patent

CA 2269250

A defect integrated processing apparatus and method for performing a processing in an integrated fashion of various kinds of defect and then detecting the accurate number, positions, sizes, etc. of the defects in detail, includes detecting light-and- shade defects based on an image data obtained by picking up an object to be inspected. Edges and minute defects on the object are detected by performing a differential processing of the image data, low contrast light-and-shade defects are detected by performing an integral processing of the image data obtained through the image pick-up device and then a differential processing of an obtained integrated image, and an integrated information of defects is obtained by performing a processing in an integrated fashion of detected defects.

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