H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/205 (2006.01)
Patent
CA 2730431
Deposition apparatus for uniformly forming material on a substrate in accordance with an exemplary embodiment is provided. The deposition apparatus includes an energy source, an electrode in a facing, spaced relationship with respect to the substrate, and interface structure joined to the electrode. The interface structure is configured to electrically couple energy from the energy source through and about the interface structure to the electrode for formation of a substantially uniform electric field between the electrode and a predetermined area of the substrate when the interface structure is supplied with energy from the energy source.
Linvention concerne un appareil de dépôt pour former uniformément un matériau sur un substrat selon un mode de réalisation dexemple. Lappareil de dépôt comprend une source dénergie, une électrode en relation de face écartée par rapport au substrat, et une structure dinterface jointe à lélectrode. La structure dinterface est configurée pour coupler électriquement lénergie depuis la source dénergie à travers et autour de la structure dinterface vers lélectrode pour la formation dun champ électrique sensiblement uniforme entre lélectrode et une zone prédéterminée du substrat lorsque la structure dinterface est alimentée en énergie par la source dénergie.
Cannella Vin
Doehler Joachim
Jones Scott
Kumar Arun
Li Yang
Macrae & Co.
United Solar Ovonic Llc
LandOfFree
Deposition apparatus for improving the uniformity of... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Deposition apparatus for improving the uniformity of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Deposition apparatus for improving the uniformity of... will most certainly appreciate the feedback.
Profile ID: LFCA-PAI-O-1611811