Deposition process in the vapour phase at low temperature of...

C - Chemistry – Metallurgy – 23 – C

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C23C 16/34 (2006.01) C04B 41/50 (2006.01) C04B 41/87 (2006.01) C23C 16/36 (2006.01) C23C 16/46 (2006.01)

Patent

CA 2010120

Deposition process in the vapour phase at low temperature of a ceramic coating of the metallic nitride or carbonitride type ABSTRACT OF THE TECHNICAL CONTENT OF THE INVENTION The object of the invention is a one-step deposition process of a coating of the ceramic type based on nitrides or carbonitrides of at least one metallic element selected from Cr, V, Zr, W, Mo, Co, Mn, Ni, Hf and Ta on a metallic or ceramic substrate, massive or obtained from fibres, by deposition in the vapour phase wherein a coating is deposited on the substrate by a chemical means at a pressure lower than 10kPa at a temperature lower than 600°C and by using a system of precursors constituted simultaneously of: - an organo-metallic precursor of the said metallic element selected from the organo-metallic compounds of the sandwich type of general formula: Image - a nitrogen precursor selected from ammonia and hydrazine. Fig. None

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