Deposition technique

Details Deposition technique Deposition technique

C - Chemistry, Metallurgy

30

B

148/2.4

C30B 25/14 (2006.01) C30B 25/02 (2006.01) C30B 29/40 (2006.01)

Patent

CA 1252695

- 21 - DEPOSITION TECHNIQUE Abstract Devices such as photodiodes based on III-V semiconductor materials have been made utilizing a CVD epitaxial procedure. This procedure includes, for example, the use of a combination of liquid and solid chloride transport sources.

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