C - Chemistry – Metallurgy – 07 – C
Patent
C - Chemistry, Metallurgy
07
C
260/396.5
C07C 309/47 (2006.01) C07C 309/53 (2006.01) G03F 7/023 (2006.01)
Patent
CA 2001492
K-17323/=/MER 20 Desensitized quinone diazide compounds Abstract The invention relates to desensitized quinone diazide compounds for use as photoactive components in radiation-sensitive compositions, such as, especially, photoresists, which compounds contain microcrystalline cellulose as desensitising agent.
Dresely Stefan
Raulin Ditmar
Ag Ciba-Geigy
Fetherstonhaugh & Co.
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