Desensitised quinone diazide compounds

Details Desensitised quinone diazide compounds Desensitised quinone diazide compounds

C - Chemistry, Metallurgy

07

C

260/396.5

C07C 309/47 (2006.01) C07C 309/53 (2006.01) G03F 7/023 (2006.01)

Patent

CA 2001492

K-17323/=/MER 20 Desensitized quinone diazide compounds Abstract The invention relates to desensitized quinone diazide compounds for use as photoactive components in radiation-sensitive compositions, such as, especially, photoresists, which compounds contain microcrystalline cellulose as desensitising agent.

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